| CODE | MNE5011 | ||||||||||||
| TITLE | VLSI Technology | ||||||||||||
| UM LEVEL | 05 - Postgraduate Modular Diploma or Degree Course | ||||||||||||
| MQF LEVEL | 7 | ||||||||||||
| ECTS CREDITS | 5 | ||||||||||||
| DEPARTMENT | Microelectronics and Nanoelectronics | ||||||||||||
| DESCRIPTION | The study-unit presents the following major process steps that are used in the fabrication, packaging and testing of Integrated Circuits in silicon, and other emerging technologies. • Microelectronics silicon planar technology: cleanroom technology, wafer–cleaning technology. • Epitaxy, oxidation, diffusion, rapid thermal processes, implantation. • Dielectric and polysilicon film deposition; lithography, etching and metallization. • Process integration: CMOS technology, bipolar technology, BiCMOS technology. • Assembly, packaging and testing. • Yield and reliability. • Advanced IC technologies: SOI, HBTs, SiGe, III-V. • Nanostructures: design and layout. Aims: The study-unit presents the major process steps that are used in the fabrication of Integrated Circuits in silicon, and other emerging technologies. Learning Outcomes: 1. Knowledge and Understanding: By the end of the study unit the student will be able to: • Comprehend and be familiar with the complexity of the processes and equipment needed to physically fabricate Integrated Circuits; • Decide which technology to use in designing specific integrated circuits taking into consideration complexity and cost. 2. Skills: By the end of the study unit the student will be able to: • Appreciate the quality and reliability issues and their fundamental importance in the microelectronics industry; • Appreciate the need for advanced IC technologies going beyond silicon; • Relate the different layers needed in an IC to the layers used in IC layout software. Textbooks: • C.Y. Chang and S.M. Sze, ULSI Technology, McGraw-Hill, ISBN 0-07-063062-3 • Simon, Sze, VLSI Technology, Mc-Graw-Hill Science/Engineering/Math 2nd Edition, 0070627355 |
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| STUDY-UNIT TYPE | Lecture | ||||||||||||
| METHOD OF ASSESSMENT |
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| LECTURER/S | Joseph Micallef |
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The University makes every effort to ensure that the published Courses Plans, Programmes of Study and Study-Unit information are complete and up-to-date at the time of publication. The University reserves the right to make changes in case errors are detected after publication.
The availability of optional units may be subject to timetabling constraints. Units not attracting a sufficient number of registrations may be withdrawn without notice. It should be noted that all the information in the description above applies to study-units available during the academic year 2024/5. It may be subject to change in subsequent years. |
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