| CODE | MNE5211 | ||||||||||||
| TITLE | MEMS Technology and Applications 1 | ||||||||||||
| UM LEVEL | 05 - Postgraduate Modular Diploma or Degree Course | ||||||||||||
| MQF LEVEL | 7 | ||||||||||||
| ECTS CREDITS | 5 | ||||||||||||
| DEPARTMENT | Microelectronics and Nanoelectronics | ||||||||||||
| DESCRIPTION | The unit gives an extensive overview of the MEMS processes as well as analytical and FEM modeling of MEMS devices. The following topics are covered: • MEMS processes: lithography, dry and wet etching, wafer bonding, doping, lift-off process, deep reactive ion etching (DRIE), thin film deposition; • Modal anlysis, Rayleigh-Ritz energy method: equivalent mass and spring constant, resonant frequency; • Heat flow analysis; • Analytical analysis of electromagnetic acturation, circuit model; • Analytical analysis of electrostatic actuation: pull-in and lift-off, circuit models; • Mass-spring-damper systems, resonant frequency, damping mechanisms, interfacing with actuation mechanisms; • Use of state-of the art MEMS characterization equipment; • Use of Matlab / Coventorware / ANSYS to model MEMS devices. Aims: This study-unit aims at highlighting the implications of downward scaling to MEMS scale. The unit also covers basic processing steps involved in MEMS design as well as the analytical analysis of basic MEMS structures such as cantilevers and membranes (plates). The unit also covers modeling of typical MEMS actuators including electrostatic and magnetic actuation. The student will also get familiar with MEMS design/simulation tools including Coventorware and ANSYS. Outcomes: By the end of this study-unit, students will be able to: • become more familiar with MEMS processes and typical devices; • model typical MEMS structures and actuation mechanisms using both lumped elements as well as Finite Element modeling (FEM) techniques; • use state of the art MEMS characterization equipment including force shaker and rate/positioning table. Textbooks: • Stephen D. Senturia, Microsystem Design, ISBN 0-7923-7246-8 |
||||||||||||
| RULES/CONDITIONS | Before TAKING THIS UNIT YOU ARE ADVISED TO TAKE MNE3305 | ||||||||||||
| STUDY-UNIT TYPE | Lecture and Tutorial | ||||||||||||
| METHOD OF ASSESSMENT |
|
||||||||||||
| LECTURER/S | Ivan Grech (Co-ord.) |
||||||||||||
|
The University makes every effort to ensure that the published Courses Plans, Programmes of Study and Study-Unit information are complete and up-to-date at the time of publication. The University reserves the right to make changes in case errors are detected after publication.
The availability of optional units may be subject to timetabling constraints. Units not attracting a sufficient number of registrations may be withdrawn without notice. It should be noted that all the information in the description above applies to study-units available during the academic year 2024/5. It may be subject to change in subsequent years. |
|||||||||||||