| CODE | MNE5212 | ||||||||||||
| TITLE | MEMS Technology and Applications 2 | ||||||||||||
| UM LEVEL | 05 - Postgraduate Modular Diploma or Degree Course | ||||||||||||
| MQF LEVEL | 7 | ||||||||||||
| ECTS CREDITS | 5 | ||||||||||||
| DEPARTMENT | Microelectronics and Nanoelectronics | ||||||||||||
| DESCRIPTION | This unit covers the aspect of determining a linearised model for MEMS devices as well as provides a deep knowledge of microfluidics as applied to MEMS devices. Topics in linearization: • Linearisation of non-linear MEMS devices including electrostatic actuator: Jacobian matrix, operating point analysis, accuracy of linearised models. Topics in Microfluidics for MEMS applications: • Surface tension, surface tension energy, capillary attraction, gas laws; • Fluid dynamics: Navier-Stokes equation, Poiseuille flow (pressure driven flow), zero slip boundary conditions, Knudsen number; • Couette flow (slide film damping) and squeeze film damping: circuit models, implications in sensors and high Q-factor resonators; • Debye length in electrolyte solutions, boundary wall potential, electrical double layers: electro-osmotic flow, electrophoresis; • Separation and mixing channels: diffusion effects. Aims: • This using aims at analyzing in detail non-linear MEMS devices as well as microfluidic applications in MEMS devices. Microfluidic applications in MEMS are important in the computation of damping as well as in the field of chemical / biomedical MEMS devices; • Both analytical and finite element modeling (FEM) are considered. Learning Outcomes: • Knowledge and Understanding: By the end of the study unit, the student will be able to: • Comprehend the procedure involved in linearising nonlinear MEMS devices in order to reduce modelling complexity; • Comprehend the concepts of microfludics as applied to MEMS devices. • Skills: By the end of the study unit the student will be able to: • model non-linear MEMS devices such as electrostatically actuated MEMS devices or springs exhibiting Duffing non-linearity; • apply microfluidics concepts such as surface tension, fluid dynamics (applications of Navier-Stokes), and their implications in MEMS devices; • comprehend microfluidic MEMS transport mechanisms including pressure-driven flow, electro-osmotic flow as well as electrophoresis. Textbooks: • Stephen D. Senturia, Microsystem Design, ISBN 0-7923-7246-8 |
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| RULES/CONDITIONS | Before TAKING THIS UNIT YOU ARE ADVISED TO TAKE MNE5211 | ||||||||||||
| STUDY-UNIT TYPE | Lecture and Tutorial | ||||||||||||
| METHOD OF ASSESSMENT |
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| LECTURER/S | Ivan Grech (Co-ord.) |
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The availability of optional units may be subject to timetabling constraints. Units not attracting a sufficient number of registrations may be withdrawn without notice. It should be noted that all the information in the description above applies to study-units available during the academic year 2024/5. It may be subject to change in subsequent years. |
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