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DC Field | Value | Language |
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dc.contributor.author | Farrugia, Russell | - |
dc.contributor.author | Portelli, Barnaby | - |
dc.contributor.author | Grech, Ivan | - |
dc.contributor.author | Micallef, Joseph | - |
dc.contributor.author | Casha, Owen | - |
dc.contributor.author | Gatt, Edward | - |
dc.date.accessioned | 2022-11-25T06:58:55Z | - |
dc.date.available | 2022-11-25T06:58:55Z | - |
dc.date.issued | 2022 | - |
dc.identifier.citation | Farrugia, R., Portelli, B., Grech, I., Micallef, J., Casha, O. & Gatt, E. (2022). An out-of-plane FR4-MEMS scanning grating for NIR spectrometer applications. 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Pont-a-Mousson. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar/handle/123456789/104006 | - |
dc.description.abstract | In this paper, we present a novel portable IR spectrometer featuring a scanning diffraction grating for simultaneous out-of-plane rotational oscillations and spectral dispersion. The scanning grating design is based on a 12×12 mm resonant scanner fabricated from an FR4 printed circuit board and operated via MEMS electromagnetic actuation. The harmonic response and damping characteristics of the relatively large aperture scanner prototype is investigated through measurements and numerical simulations. Compared to the state-of-the-art, the FR4-MEMS scanning grating achieves exceptional scanning efficiency (0.13 °/mA) and a low operating frequency (190 Hz). A compact volume spectrometer design (99×84×59 mm 3 ) is made possible by the integration of the scanning grating, photodetector and drive and readout electronics on a single PCB. Measurements demonstrate that a spectral range of 1230-2190 nm and a spectral resolution of around 10 nm is achieved with the NIR spectrometer prototype. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Institute of Electrical and Electronics Engineers | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Damping (Mechanics) | en_GB |
dc.subject | Diffraction gratings | en_GB |
dc.subject | Infrared spectra | en_GB |
dc.subject | Infrared spectroscopy | en_GB |
dc.subject | Microfabrication | en_GB |
dc.subject | Optical MEMS | en_GB |
dc.subject | Optical scanners | en_GB |
dc.subject | Printed circuits | en_GB |
dc.subject | Optical detectors | en_GB |
dc.title | An out-of-plane FR4-MEMS scanning grating for NIR spectrometer applications | en_GB |
dc.type | conferenceObject | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.bibliographicCitation.conferencename | 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) | en_GB |
dc.bibliographicCitation.conferenceplace | Pont-a-Mousson, France. 11-13/07/2022. | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1109/DTIP56576.2022.9911731 | - |
Appears in Collections: | Scholarly Works - FacICTMN |
Files in This Item:
File | Description | Size | Format | |
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An_out-of-plane_FR4-MEMS_Scanning_Grating_for_NIR_Spectrometer_Applications-2022.pdf Restricted Access | 1.52 MB | Adobe PDF | View/Open Request a copy |
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