Please use this identifier to cite or link to this item:
https://www.um.edu.mt/library/oar/handle/123456789/17627Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Farrugia, Russell | - |
| dc.contributor.author | Grech, Ivan | - |
| dc.contributor.author | Casha, Owen | - |
| dc.contributor.author | Micallef, Joseph | - |
| dc.contributor.author | Gatt, Edward | - |
| dc.date.accessioned | 2017-03-20T09:17:07Z | - |
| dc.date.available | 2017-03-20T09:17:07Z | - |
| dc.date.issued | 2016 | - |
| dc.identifier.citation | Farrugia, R., Grech, I., Casha, O., Micallef, J., & Gatt, E. (2016). Analysis of dynamic deformation in 1-D resonating micromirrors. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Budapest. 1-6. | en_GB |
| dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/17627 | - |
| dc.description | The work presented in this paper is part of the research undertaken by the authors in Lab4MEMSII, which is an ENIAC Joint Undertaking financed project. | en_GB |
| dc.description.abstract | Dynamic deformation is an important characteristic in high frequency resonating microscanners intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. Applicability of the one dimensional plate theory in evaluating micromirror bending due to inertial loads is investigated using finite element analysis. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover spring-linkage effects were also addressed and significant improvement in the dynamic deformation was achieved by the inclusion of a gimbal structure between the micromirror and the torsional springs. | en_GB |
| dc.language.iso | en | en_GB |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | en_GB |
| dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
| dc.subject | Optical scanners | en_GB |
| dc.subject | Finite element method | en_GB |
| dc.subject | Springs (Mechanism) | en_GB |
| dc.title | Analysis of dynamic deformation in 1-D resonating micromirrors | en_GB |
| dc.type | conferenceObject | en_GB |
| dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
| dc.bibliographicCitation.conferencename | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) | en_GB |
| dc.bibliographicCitation.conferenceplace | Budapest, Hungary, 30/05-02/06/2016 | en_GB |
| dc.description.reviewed | peer-reviewed | en_GB |
| dc.identifier.doi | 10.1109/DTIP.2016.7514838 | - |
| Appears in Collections: | Scholarly Works - FacICTMN | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Analysis of Dynamic Deformation in 1-D Resonating Micromirrors.pdf Restricted Access | Analysis of dynamic deformation in 1-D resonating micromirrors | 565.25 kB | Adobe PDF | View/Open Request a copy |
Items in OAR@UM are protected by copyright, with all rights reserved, unless otherwise indicated.