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https://www.um.edu.mt/library/oar/handle/123456789/17630
Title: | Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process |
Authors: | Briffa, Ansel Gatt, Edward Micallef, Joseph Grech, Ivan Casha, Owen Darmanin, Jean Marie |
Keywords: | Springs (Mechanism) Microelectromechanical systems Accelerometers Microactuators Electrodes |
Issue Date: | 2013 |
Publisher: | Institute of Electrical and Electronics Engineers Inc. |
Citation: | Briffa, A., Gatt, E., Micallef, J., Grech, I., Casha, O., & Darmanin, J. M. (2013). Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process. Eurocon 2013, Zagreb. 2094-2099. |
Abstract: | This paper presents a comparison between two designs of capacitive accelerometers implemented using the Thick Epitaxial Layer for Micro-actuators and Accelerometers (ThELMA) process. The design methodology aims to reduce the total device area whilst using a separate mass approach for the three different axes. The designs use a folded spring topology and serpentine spring topology for the in-plane sensors and torsional springs for the out-of-plane (Z-axis) sensor. The sensors have a resonant frequency of about 1.7 kHz, a maximum acceleration of 13g, a sensitivity of around 8 fF/g and a mechanical cross-axis sensitivity of less than 1%. A reduction of 23% in device area was achieved between these two designs, without a reduction in performance. |
Description: | This research was sponsored by ST-Microelectronics Malta. |
URI: | https://www.um.edu.mt/library/oar//handle/123456789/17630 |
Appears in Collections: | Scholarly Works - FacICTMN |
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File | Description | Size | Format | |
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Area Minimization of a Three-Axis Separate Mass Capacitive Accelerometer using the ThELMA Process.pdf Restricted Access | Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process | 1.99 MB | Adobe PDF | View/Open Request a copy |
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