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DC Field | Value | Language |
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dc.contributor.author | Darmanin, Jean Marie | - |
dc.contributor.author | Grech, Ivan | - |
dc.contributor.author | Micallef, Joseph | - |
dc.contributor.author | Gatt, Edward | - |
dc.contributor.author | Casha, Owen | - |
dc.contributor.author | Briffa, Ansel | - |
dc.date.accessioned | 2017-03-21T17:49:06Z | - |
dc.date.available | 2017-03-21T17:49:06Z | - |
dc.date.issued | 2013 | - |
dc.identifier.citation | Darmanin, J. M., Grech, I., Micallef, J., Gatt, E., Casha, O., & Briffa, A. (2013). Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass. Eurocon 2013, Zagreb. 2100-2105. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/17708 | - |
dc.description | The authors would like to acknowledge ST-Microelectronics Malta for funding this research. | en_GB |
dc.description.abstract | This paper presents three different designs of three-axis accelerometers using a thick epitaxial surface micromachining process. The designs have a common serpentine spring topology, providing a resonant frequency of around 1.5 kHz, with a spring length of 350 μm and have capacitive sensitivities in the region of 5 to 10 fF/g for the X and Y sensing. The Z-axis sensing is performed by means of torsional springs of 370 μm in length. The sensing techniques include varying gap differential combs for the XY-axes; varying gap differential electrodes and varying overlap area for the Z-axis. The acceleration range for all designs is ±10 g and the overall sensitivity was increased by having a large nominal capacitance. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Microelectromechanical systems | en_GB |
dc.subject | Engineering design | en_GB |
dc.subject | Accelerometers | en_GB |
dc.subject | Micromachining | en_GB |
dc.subject | Capacitance meters | en_GB |
dc.title | Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass | en_GB |
dc.type | conferenceObject | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.bibliographicCitation.conferencename | Eurocon 2013 | en_GB |
dc.bibliographicCitation.conferenceplace | Zagreb, Croatia, 01-04/07/2013 | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1109/EUROCON.2013.6625270 | - |
Appears in Collections: | Scholarly Works - FacICTMN |
Files in This Item:
File | Description | Size | Format | |
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Design Consideration for Three-Axis MEMS Accelerometers using an Asymmetric Proof Mass.pdf Restricted Access | Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass | 1.48 MB | Adobe PDF | View/Open Request a copy |
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