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DC Field | Value | Language |
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dc.contributor.author | Grixti, Ryan | - |
dc.contributor.author | Grech, Ivan | - |
dc.contributor.author | Casha, Owen | - |
dc.contributor.author | Darmanin, Jean Marie | - |
dc.contributor.author | Gatt, Edward | - |
dc.contributor.author | Micallef, Joseph | - |
dc.date.accessioned | 2017-03-25T18:35:01Z | - |
dc.date.available | 2017-03-25T18:35:01Z | - |
dc.date.issued | 2014 | - |
dc.identifier.citation | Grixti, R., Grech, I., Casha, O., Darmanin, J. M., Gatt, E., & Micallef, J. (2014). Feasibility study of a MEMS microphone design using the PolyMUMPs process. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Cannes. 1-4. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/17808 | - |
dc.description.abstract | The scope of this paper is to underline the design issues of MEMS microphones and presents a test case designed using the PolyMUMPs process with an additional back-etch processing step. Both circular and square (simply supported and clamped) diaphragm designs are considered. The effect of the back chamber volume on the microphone sensitivity is also investigated. The finalized design is based on the clamped square diaphragm with a bottom sound port. The bias voltage is 6 V and the diaphragm has a side-length of 675 μm. The back-plate includes several holes which amount to a perforation ratio of 0.33. The maximum allowable input pressure before pull-in is 139 dB SPL. The microphone with a back-chamber volume of 6 mm3 has a sensitivity of 8.4 mV/Pa at 94 dB SPL at 1 kHz. The complete package size with the ASIC included is targeted to be 3×2.5×1 mm, assuming that the ASIC is of a comparable size to that of the MEMS sensor. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Application-specific integrated circuits | en_GB |
dc.subject | Microelectromechanical systems | en_GB |
dc.subject | Capacitance meters | en_GB |
dc.subject | Etching | en_GB |
dc.title | Feasibility study of a MEMS microphone design using the PolyMUMPs process | en_GB |
dc.type | conferenceObject | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.bibliographicCitation.conferencename | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) | en_GB |
dc.bibliographicCitation.conferenceplace | Cannes, France, 1-4/04/2014 | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1109/DTIP.2014.7056647 | - |
Appears in Collections: | Scholarly Works - FacICTMN |
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Feasibility Study of a MEMS Microphone Design using the PolyMUMPs Process.pdf Restricted Access | Feasibility study of a MEMS microphone design using the PolyMUMPs process | 305.16 kB | Adobe PDF | View/Open Request a copy |
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