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DC Field | Value | Language |
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dc.contributor.author | Darmanin, Jean Marie | - |
dc.contributor.author | Grech, Ivan | - |
dc.contributor.author | Gatt, Edward | - |
dc.contributor.author | Casha, Owen | - |
dc.date.accessioned | 2017-03-27T09:48:32Z | - |
dc.date.available | 2017-03-27T09:48:32Z | - |
dc.date.issued | 2012 | - |
dc.identifier.citation | Darmanin, J. M., Grech, I., Gatt, E., & Casha, O. (2012). Design of a 2-axis MEMS accelerometer. 18th IEEE International Conference on Electronics, Circuits, and Systems, Beirut. 268-271. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/17871 | - |
dc.description.abstract | The miniaturisation and reduction in cost of acceleration sensors led to the increase of use of said sensors in a large number of devices. Such include: Inertial Measurement Units (IMUs), air-bag deployment mechanism and consumer electronic devices. This paper presents three alternative designs of capacitive sensing MEMS 2-axis accelerometers. All designs have a common fabrication process but each design features different characteristics in terms of spring design and layout. A novel design methodology was devised such that the three designs have approximately the same characteristics such that cross-comparisons can be done. The resonant frequency was designed to be about 1.5 kHz and the accelerometers have a sensitivity of 400 aF/ms-2. Behavioural Model Simulations using SaberĀ® Simulator and Finite Element Method (FEM) analysis were performed on these three designs. A comparison between the two different types of simulators was performed. This resulted in the conclusion that both simulators have comparable results and the variation between theoretical and simulation results can be attributed to the assumptions and inaccuracies of the mathematical model used in the theoretical computation. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Finite element method | en_GB |
dc.subject | Accelerometers | en_GB |
dc.subject | Microelectromechanical systems | en_GB |
dc.subject | Capacitance meters | en_GB |
dc.subject | Detectors | en_GB |
dc.title | Design of a 2-axis MEMS accelerometer | en_GB |
dc.type | conferenceObject | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder. | en_GB |
dc.bibliographicCitation.conferencename | 18th IEEE International Conference on Electronics, Circuits, and Systems | en_GB |
dc.bibliographicCitation.conferenceplace | Beirut, Lebanon, 11-14/12/2011 | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1109/ICECS.2011.6122265 | - |
Appears in Collections: | Scholarly Works - FacICTMN |
Files in This Item:
File | Description | Size | Format | |
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Design of a 2-Axis MEMS Accelerometer.pdf Restricted Access | Design of a 2-axis MEMS accelerometer | 813.17 kB | Adobe PDF | View/Open Request a copy |
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