Please use this identifier to cite or link to this item:
https://www.um.edu.mt/library/oar/handle/123456789/26394| Title: | Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors |
| Authors: | Torok, Peter Mule’ Stagno, Luciano |
| Keywords: | Infrared telescopes Micromechanics Fracture mechanics |
| Issue Date: | 1997 |
| Publisher: | Wiley-Blackwell Publishing Ltd. |
| Citation: | Torok, P., & Mule Stagno, L. (1997). Applications of scanning optical microscopy in materials science to detect bulk microdefects in semiconductors. Journal of Microscopy, 188(1), 1-16. |
| Abstract: | We review the application of scanning optical microscopy to bulk microdefect detection in semiconductor materials. After an extensive literature review we summarize theoretical aspects of the scanning infra-red microscope and describe the theory of contrast formation. We also show experimental examples of scanning infra-red images taken by different modes of the microscope and give an experimental confirmation of the contrast theory. |
| URI: | https://www.um.edu.mt/library/oar//handle/123456789/26394 |
| Appears in Collections: | Scholarly Works - InsSE |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| T-r-k_et_al-1997-Journal_of_Microscopy.pdf Restricted Access | 1.82 MB | Adobe PDF | View/Open Request a copy |
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