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DC Field | Value | Language |
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dc.contributor.author | Farrugia, Russell | - |
dc.contributor.author | Grech, Ivan | - |
dc.contributor.author | Camilleri, Duncan | - |
dc.contributor.author | Casha, Owen | - |
dc.contributor.author | Gatt, Edward | - |
dc.contributor.author | Micallef, Joseph | - |
dc.date.accessioned | 2018-04-05T13:33:48Z | - |
dc.date.available | 2018-04-05T13:33:48Z | - |
dc.date.issued | 2018 | - |
dc.identifier.citation | Farrugia, R., Grech, I., Camilleri, D., Casha, O., Gatt, E., & Micallef, J. (2018). Theoretical and finite element analysis of dynamic deformation in resonating micromirrors. Microsystem Technologies, 24(1), 445-455. | en_GB |
dc.identifier.uri | https://www.um.edu.mt/library/oar//handle/123456789/28800 | - |
dc.description.abstract | Dynamic deformation is one of the limiting factors in the design of high frequency resonating micro-scanners that are intended for high definition raster scanning display applications. Out-of-plane deformation resulting from high acceleration loads causes beam divergence, which will in turn reduce the optical resolution. This paper presents a detailed analysis on the mechanical design aspects contributing to dynamic deformation such as the micromirror layout and the micromirror-spring linkage design. The applicability of one-dimensional plate bending theory in evaluating micromirror deformation due to inertial loads is investigated using finite element analysis. Improved analytical dynamic deformation predictions, which take into consideration the two-dimensional mirror plate twist, will also be presented. A comparison among a number of layout designs was carried out with the aim of increasing micromirror bending stiffness in a direction parallel to the axis of rotation. Moreover, spring-linkage effects were also addressed and a significant improvement in dynamic deformation was achieved with the inclusion of a gimbal structure between the micromirror and the torsion springs. A parametric analysis was also carried out in order to optimise the gimbal frame design in order to comply with the Rayleigh diffraction limit criterion. | en_GB |
dc.language.iso | en | en_GB |
dc.publisher | Springer | en_GB |
dc.rights | info:eu-repo/semantics/restrictedAccess | en_GB |
dc.subject | Fibrous composites | en_GB |
dc.subject | Finite element method -- Data processing | en_GB |
dc.subject | Microelectromechanical systems | en_GB |
dc.subject | Resonators | en_GB |
dc.title | Theoretical and finite element analysis of dynamic deformation in resonating micromirrors | en_GB |
dc.type | article | en_GB |
dc.rights.holder | The copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder | en_GB |
dc.description.reviewed | peer-reviewed | en_GB |
dc.identifier.doi | 10.1007/s00542-017-3335-7 | - |
dc.publication.title | Microsystem Technologies | en_GB |
Appears in Collections: | Scholarly Works - FacEngME Scholarly Works - FacICTMN |
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Theoretical and finite element analysis_of_dynamic_deformation_in_resonating_micromirrors.pdf Restricted Access | 2.66 MB | Adobe PDF | View/Open Request a copy |
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