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Please use this identifier to cite or link to this item: https://www.um.edu.mt/library/oar/handle/123456789/59104
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dc.contributor.authorFarrugia, Russell-
dc.contributor.authorPortelli, Barnaby-
dc.contributor.authorGrech, Ivan-
dc.contributor.authorCamilleri, Duncan-
dc.contributor.authorCasha, Owen-
dc.contributor.authorMicallef, Joseph-
dc.contributor.authorGatt, Edward-
dc.date.accessioned2020-07-28T10:05:03Z-
dc.date.available2020-07-28T10:05:03Z-
dc.date.issued2018-
dc.identifier.citationFarrugia, R., Portelli, B., Grech, I., Camilleri, D., Casha, O., Micallef, J., & Gatt, E. (2018). Air damping analysis in resonating micro-mirrors. 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Rome.en_GB
dc.identifier.urihttps://www.um.edu.mt/library/oar/handle/123456789/59104-
dc.description.abstractThe maximum scanning amplitude achievable by resonating micro-mirrors intended for micro-projection display applications is a function of air damping. Simplified analytical damping calculations can be employed in order to determine the damping moment of electrostatically actuated micro-mirrors however, their accuracy is limited. Three-dimensional computational fluid dynamic models are therefore presented to simulate the interaction of air with a MEMS micro-mirror oscillating at high frequency and large scan angles. Transient analyses were performed using the sliding mesh technique available in ANSYS Fluent to evaluate the dynamic fluid flow conditions present in vertical comb structures. The time- dependent damping moment contributions due to viscous shear and pressure drag are subsequently computed for both mirror plate and comb drive structures. Good agreement in the overall quality factor is achieved between simulation and measurement results.en_GB
dc.language.isoenen_GB
dc.publisherInstitute of Electrical and Electronics Engineersen_GB
dc.rightsinfo:eu-repo/semantics/restrictedAccessen_GB
dc.subjectDamping (Mechanics)en_GB
dc.subjectMirrorsen_GB
dc.subjectFluidsen_GB
dc.subjectThumben_GB
dc.subjectMathematical modelsen_GB
dc.subjectComputational fluid dynamicsen_GB
dc.subjectNumerical grid generation (Numerical analysis)en_GB
dc.subjectOptical MEMSen_GB
dc.subjectShear flowen_GB
dc.titleAir damping analysis in resonating micro-mirrorsen_GB
dc.typeconferenceObjecten_GB
dc.rights.holderThe copyright of this work belongs to the author(s)/publisher. The rights of this work are as defined by the appropriate Copyright Legislation or as modified by any successive legislation. Users may access this work and can make use of the information contained in accordance with the Copyright Legislation provided that the author must be properly acknowledged. Further distribution or reproduction in any format is prohibited without the prior permission of the copyright holder.en_GB
dc.bibliographicCitation.conferencename2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)en_GB
dc.bibliographicCitation.conferenceplaceRome, Italy, 22-25/05/2018en_GB
dc.description.reviewedpeer-revieweden_GB
dc.identifier.doi10.1109/DTIP.2018.8394220-
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