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https://www.um.edu.mt/library/oar/handle/123456789/59289| Title: | Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPS process |
| Authors: | Farrugia, Russell Portelli, Barnaby Grech, Ivan Micallef, Joseph Casha, Owen Gatt, Edward |
| Keywords: | Silicon-on-insulator technology Quantum optics |
| Issue Date: | 2020 |
| Publisher: | Institute of Electrical and Electronics Engineers |
| Citation: | Farrugia, R., Portelli, B., Grech, I., Micallef, J., Casha, O., & Gatt, E. (2020). Design and fabrication of high performance resonant micro-mirrors using the standard SOIMUMPS process. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2020), Lyon |
| Abstract: | In this paper, we present the design and comparative analysis of two high frequency resonant micro-mirrors which incorporate direct and indirect electrostatic drive configurations. Innovative claims include: (1) the implementation of high fidelity fluid-structural coupled damping simulations in the design optimization process of indirect drive micro-mirrors; (2) demonstration of an optimized single-Si layer design that maximizes scanning efficiency while achieving minimal mirror dynamic deformation, δdyn. A total optical scan angle, δdyn, of 37° at a scanning frequency, fs , of 25 kHz and a sinusoidal drive voltage amplitude, V drive of 200 V is achieved by the 1 mm-diameter, D, indirect drive micro-mirror design. |
| URI: | https://www.um.edu.mt/library/oar/handle/123456789/59289 |
| Appears in Collections: | Scholarly Works - FacICTMN |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| Design_and_fabrication_of_high_performance_resonant_micro-mirrors_using_the_standard_SOIMUMPS_process_2020.pdf Restricted Access | 2.08 MB | Adobe PDF | View/Open Request a copy |
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