Browsing by Subject Microactuators
Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
2013 | Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process | Briffa, Ansel; Gatt, Edward; Micallef, Joseph; Grech, Ivan; Casha, Owen; Darmanin, Jean Marie |
2017 | Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators | Portelli, Barnaby; Farrugia, Russell; Grech, Ivan; Casha, Owen; Micallef, Joseph; Gatt, Edward |
2018 | Exploiting nonlinearities to improve the linear region in an electrostatic MEMS demodulator | Scerri, Jeremy; Portelli, Barnaby; Grech, Ivan; Gatt, Edward; Casha, Owen |