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https://www.um.edu.mt/library/oar/handle/123456789/17708| Title: | Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass |
| Authors: | Darmanin, Jean Marie Grech, Ivan Micallef, Joseph Gatt, Edward Casha, Owen Briffa, Ansel |
| Keywords: | Microelectromechanical systems Engineering design Accelerometers Micromachining Capacitance meters |
| Issue Date: | 2013 |
| Publisher: | Institute of Electrical and Electronics Engineers Inc. |
| Citation: | Darmanin, J. M., Grech, I., Micallef, J., Gatt, E., Casha, O., & Briffa, A. (2013). Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass. Eurocon 2013, Zagreb. 2100-2105. |
| Abstract: | This paper presents three different designs of three-axis accelerometers using a thick epitaxial surface micromachining process. The designs have a common serpentine spring topology, providing a resonant frequency of around 1.5 kHz, with a spring length of 350 μm and have capacitive sensitivities in the region of 5 to 10 fF/g for the X and Y sensing. The Z-axis sensing is performed by means of torsional springs of 370 μm in length. The sensing techniques include varying gap differential combs for the XY-axes; varying gap differential electrodes and varying overlap area for the Z-axis. The acceleration range for all designs is ±10 g and the overall sensitivity was increased by having a large nominal capacitance. |
| Description: | The authors would like to acknowledge ST-Microelectronics Malta for funding this research. |
| URI: | https://www.um.edu.mt/library/oar//handle/123456789/17708 |
| Appears in Collections: | Scholarly Works - FacICTMN |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Design Consideration for Three-Axis MEMS Accelerometers using an Asymmetric Proof Mass.pdf Restricted Access | Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass | 1.48 MB | Adobe PDF | View/Open Request a copy |
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